Skip Ribbon Commands
Skip to main content
College of Electrical & Mechanical Engineering  (CEME)
Dr Muhammad Mubasher Saleem
Assistant Professor
Department of Mechatronics Engineering

National University of Sciences and Technology (NUST)
Peshawar Road Rawalpindi
Tel :  

Microelectromchanical Systems (MEMs)​

PhD (Mechatronics) 2015, Italy

Dr. Mubasher Saleem completed his B.Sc. Electrical Engg. from University of Engineering and Technology (UET) Lahore (2008), MS in Electronic Engineering from Ghulam Ishaq Khan Institute of Engineering Sciences and Technology (GIKI), Topi (2010) and Ph.D. in Mechanical Engineering from Politecnico di Torino, Italy (2015). He received best PhD dissertation award for PhD research work related to RF-MEMS design optimization, fabrication, testing and failure analysis for the space applications. Dr. Mubasher has contributed over 50 research articles in the field MEMS/Microsystems design and development in journals and conferences of international repute.

Research: The main research interests of Dr. Mubasher include development of high performance and reliable MEMS/Microsystems for robotics, aerospace, biomedical and consumer applications. The MEMS sensors and devices on which he is currently working include MEMS inertial sensors, RF-MEMS, Microgrippers, MEMS tactile sensors for tele-manipulation in robotic surgery and MEMS energy harvesters.

Area of Interest: 

MEMS Reliability, RF-MEMS, MEMS Inertial Sensors, BioMEMS

Journal Publications: 

1.    Nawaz H, Masood MU, Saleem MM, Iqbal J, Zubair M. Surface roughness effects on electromechanical performance of RF-MEMS capacitive switches. Microelectronics Reliability. 2020 Jan 1;104:113544.

2.    Ghazal S, Khan US, Saleem MM, Rashid N, Iqbal J. Human activity recognition using 2D skeleton data and supervised machine learning. IET Image Processing. 2019 Sep 4;13(13):2572-8.

3.    Haider ST, Saleem MM, Ahmed M. Effect of environmental conditions and geometric parameters on the squeeze film damping in RF-MEMS switches. Analog Integrated Circuits and Signal Processing. 2019 Aug 15;100(2):357-68.

4.    Somà A, Saleem MM, Margesin B, Armando M. Pull-in tests of MEMS specimens for characterization of elastic–plastic behavior. Microsystem Technologies. 2019 Jul 1:1-9.

5.    Saleem MM, Nawaz H. A systematic review of reliability issues in RF-MEMS switches. Micro and Nanosystems. 2019 May 1;11(1):11-33.

6.    Masood MU, Saleem MM, Khan US, Hamza A. Design, closed-form modeling and analysis of SU-8 based electrothermal microgripper for biomedical applications. Microsystem Technologies. 2019 Apr 4;25(4):1171-84.

7.    Somà A, Saleem MM. Elastic–plastic characterization of microstructures through pull-in 4 point bending test. Journal of Micromechanics and Microengineering. 2018 Dec 21;29(2):025004.

8.    Younis S, Saleem MM, Zubair M, Zaidi SM. Multiphysics design optimization of RF-MEMS switch using response surface methodology. Microelectronics Journal. 2018 Jan 1;71:47-60.

9.    Saleem MM, Danish AM, Iqbal J, Bazaz SA. Wide bandwidth 2-DoF electromagnetic MEMS energy harvester for low g applications. Microsystem Technologies. 2017 Dec 1;23(12):5477-89.

10.    Saleem MM, Farooq U, Izhar U, Khan US. Multi-response optimization of electrothermal micromirror using desirability function-based response surface methodology. Micromachines. 2017 Apr;8(4):107.

11. S. Younis, M.M.Saleem (2017) "Multiphysics design exploration and optimization of RF-MEMS switch using response surface methodology"   Microelectronics Journal, 47-60, (Impact factor: 1.213; Publisher: Elsevier)

12. Ghani et al. (2017) " Efficient FIR Filter Implementations for Multi-Channel BCIs using Xilinx System Generator" BioMed Research International (Impact factor: 2.47; Publisher: Hindawi)

13. Saleem, M.M., Farooq, U., Izhar, U. and Khan, U.S., (2017). Multi-Response Optimization of Electrothermal Micromirror Using Desirability Function-Based Response Surface Methodology. Micromachines, 8(4), p.107. (Impact factor: 1.83; Publisher: MDPI)

14. Saleem, M. M., Danish, A. M., Iqbal, J., & Bazaz, S. A. (2017). Wide bandwidth 2-DoF electromagnetic MEMS energy harvester for low g applications. Microsystem Technologies, 1-13. (Impact factor: 0.952; Publisher: Springer)

15. Somà, A., & Saleem, M. M. (2015). Modeling and experimental verification of thermally induced residual stress in RF-MEMS. Journal of Micromechanics and Microengineering, 25(5), 055007. (Impact factor: 1.725; Publisher: IOP Science)

16. Somà, A., Saleem, M. M., & De Pasquale, G. (2016). Effect of creep in RF MEMS static and dynamic behavior. Microsystem Technologies, 22(5), 1067-1078. (Impact factor: 0.952; Publisher: Springer)

17. Saleem, M. M., & Somà, A. (2015). Design optimization of RF-MEMS switch considering thermally induced residual stress and process uncertainties.Microelectronics Reliability, 55(11), 2284-2298. (Impact factor: 1.214; Publisher: Elsevier)

18. Saleem, M. M., & Somá, A. (2015). Design of experiments based factorial design and response surface methodology for MEMS optimization.Microsystem Technologies, 21(1), 263-276. (Impact factor: 0.952; Publisher: Springer)

19. Saleem, M. M., & Bazaz, S. A. (2011). Design and robustness analysis of structurally decoupled 3-DoF MEMS gyroscope in the presence of worst-case process tolerances. Microsystem technologies, 17(8), 1381-1391. (Impact factor: 0.952; Publisher: Springer)

20. R.I. Shakoor, S.A. Bazaz, M.M. Saleem (2011) "Mechanically Amplified 3-DoF Non-Resonant MEMS gyroscope Fabricated in Low Cost MetalMUMPs Process.", Journal of Mechanical Design, 133(11), 111002. (Impact factor: 1.45; Publisher: ASME)

21. Riaz, K., Bazaz, S. A., Saleem, M. M., & Shakoor, R. I. (2011). Design, damping estimation and experimental characterization of decoupled 3-DoF robust MEMS gyroscope. Sensors and Actuators A: Physical, 172(2), 523-532. (Impact factor: 1.94; Publisher: Elsevier).

Conference Publications: 

1. Somà, A., Saleem, M. M., & Margesin, B. (2017, May). Experimental characterization of elastic-plastic behavior of MEMS electroplated gold specimens. In Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2017 Symposium on (pp. 1-4). IEEE.

2. Younis, S., Khan, F., Saleem, M. M., & Zaidi, S. M. T. (2017, April). Effect of residual stress on electromagnetic characteristics of capacitive RFMEMS Switch. In Electrical and Electronic Engineering (ICEEE), 2017 4th International Conference on (pp. 130-134). IEEE.

3. Islam, S. O. B., Abbas, M. Z., Rehman, S., Khan, U. S., & Saleem, M. M. (2016, December). Fatigue testing of MEMS device developed by MetalMUMPs fabrication process. In Computer and Information Technology (ICCIT), 2016 19th International Conference on (pp. 550-556). IEEE.

4. M.M. Saleem, A. Somà (2015) "Design of Experiments for MEMS Reliability" 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Xi’an, China, 7-11 April.

5. A. Somà, G. De Pasquale, M.M. Saleem (2015) "Experimental investigation of creep in gold RF-MEMS microstructures." SPIE Microtechnologies, Barcelona, Spain, 4-6 May. 

6. M.M. Saleem, A. Somà, G. De Pasquale (2014) "Design and FEM modeling of notch effect in gold microbeams.", In: Symposium on Design, Testing, Integration, and Packaging of MEMS/MOEMS (DTIP), Cannes, France, 2-4 April.

7. A. Somà, G. De Pasquale, M.M. Saleem (2014) "Creep in MEMS", In: Symposium on Design, Testing, Integration, and Packaging of MEMS/MOEMS (DTIP), Cannes, France, 2-4 April.

8. M.M. Saleem, A. Somà (2013) "Robust design optimization of capacitive RF-MEMS by using DOE analysis." In: Proc. International Semiconductor Conference (CAS 2013), Sinaia, Romania, 12-14 Oct.


DESIGNATION​ ​FROM​ TO​​ University / Institute​​​​
​Assistant Professor 2015 ​Date ​​Deptt of Mechatronics Engineering, NUST College of EME
​​​​Research Associate/Lecturer 2010 ​2012 ​GIK Institute, Topi
​Graduate Assistant ​2009 ​2010 GIK Institute, Topi

MTS-336 Instrumentation and Measurements
EE 223 Digital Logic Design
ME-304 Mechanical Vibrations
EE-818 Microelectromechanical Systems
MTS-840 Data Acquisition and Control
EE-323 Microprocessor Interfacing
CS-324 Computer Architecture
EE-425 Digital Integrated Circuit Design

Dr. Mubasher is actively involved with local industry and is working in joint collaboration with industry for the development of MEMS devices.